shallow trench isolation oxide thickness leakage
由EPerrin著作—ThispaperproposesareviewofthevariousconsequencesoftheShallowTrenchIsolation(STI)oxidethicknessvariationsondifferentprocessstepsand.,由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...ST...
A Complete Evaluation of Trench Oxide Thickness Effect ...
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由EPerrin著作—ThispaperproposesareviewofthevariousconsequencesoftheShallowTrenchIsolation(STI)oxidethicknessvariationsondifferentprocessstepsand.
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